Using fabrication process of the integrated circuit (IC), MicroElectroMechanical Systems (MEMS) technology
integrates multiple functions of mechanical, electrical, magnetic, thermal and optics into a single semiconductor
substrate. Fuction integration in micro-scale across such variety of disciplines enables the systems of which performance,
cost and footprint are not achievable with any other technology.
The advanced MicroElectroMechanical System (A-MEMS)
and Application laboratory is funded by the Leaders Opportunity Fund (LOF) from the Canadian Foundation for Innovation (CFI), the Nova
Scotia Research and Innovation Trust, the Natural Sciences and Engineering Research Council of Canada (NSERC), and Dalhousie University for
world-class research and technology development.
