Advanced MicroElectroMechanical Systems (A-MEMS) and Application Laboratory

Veeco NT9100 In-Motion

Using fabrication process of the integrated circuit (IC), MicroElectroMechanical Systems (MEMS) technology integrates multiple functions of mechanical, electrical, magnetic, thermal and optics into a single semiconductor substrate. Fuction integration in micro-scale across such variety of disciplines enables the systems of which performance, cost and footprint are not achievable with any other technology.

The advanced MicroElectroMechanical System (A-MEMS) and Application laboratory is funded by the Leaders Opportunity Fund (LOF) from the Canadian Foundation for Innovation (CFI), the Nova Scotia Research and Innovation Trust, the Natural Sciences and Engineering Research Council of Canada (NSERC), and Dalhousie University for world-class research and technology development.