Advanced MicroElectroMechanical Systems (A-MEMS) and Application Laboratory


photo Yuan Ma, PhD, PEng

Associate Professor

Dept. of Electrical & Computer Engineering

Director, The Advanced MEMS and Application Lab


Yuan Ma is an Associate Professor in the Electrical and Computer Engineering Department at Dalhousie University. She has Bachelor and M.Eng. degrees in Applied Physics from Southeast University, P.R. China; and M.Sc. and Ph.D. degrees in Microelectronics from University of Alberta. Before she joined Dalhousie University, she was a research scientist and a key member of the MEMS design team at JDS Uniphase (current Lumentum and Viavi, Ottawa).


group picture

Using fabrication process of the integrated circuit (IC), MicroElectroMechanical Systems (MEMS) technology integrates multiple functions of mechanical, electrical, magnetic, thermal, and optics into a single semiconductor substrate. Micro-scale function integration across the variety of disciplines enables the systems of which performance, cost and footprint are not achievable with any other technology. For example, the MEMS micromirrors in Lumentum's Wavelength Selective Switches (WSS) enable high-performance optical switching with low insertion loss, broadband operation, high mechanical strength with a compact size, making it an excellent solution for large-scale optical networks and the evolving requirements of AI infrastructure.


The advanced MicroElectroMechanical System (A-MEMS) and Application laboratory is funded by the Leaders Opportunity Fund (LOF) from the Canadian Foundation for Innovation (CFI), the Nova Scotia Research and Innovation Trust, the Natural Sciences and Engineering Research Council of Canada (NSERC), and Dalhousie University for world-class research and technology development.