Advanced MicroElectroMechanical Systems (A-MEMS) and Application Laboratory


CMOS-MEMS ECED 6240 - CMOS-MEMS









References:


1. CMOS - MEMS, edited by Henry Baltes et. al., Wiley-VCH, 2005.

2. Foundations of MEMS, by Liu.

3. Selected readings from research literatures, to be distributed in class.



News:

Lab1 Sample Report

PolyMUMPs Design Handbook

MEMS Design Tools

COMSOL - Variable Capacitor Example Thermal Actuator Example